Electrostatic Actuation of Thin-Film Microelectromechanical Structures

AuthID
P-000-G99
3
Author(s)
Tipo de Documento
Article
Year published
2003
Publicado
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 93, Número: 12, Páginas: 10018-10029 (12)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0038803803
Wos: WOS:000183288900094
Source Identifiers
ISSN: 0021-8979
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