Low-Temperature Thin-Film Silicon Mems

AuthID
P-000-HDW
3
Author(s)
1
Editor(es)
Roca i Cabarrocas PFortunato GRobertson JStutzmann M
Tipo de Documento
Article
Year published
2003
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 427, Número: 1-2, Páginas: 181-186 (6)
Conference
4Th Symposium on Thin Films for Large Area Electronics Held at the Emrs 2002 Spring Conference, Date: JUN 18-21, 2002, Location: STRASBOURG, FRANCE, Patrocinadores: European Mat Res Soc
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0037416759
Wos: WOS:000182573200036
Source Identifiers
ISSN: 0040-6090
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