Microstructure and Nanomechanical Properties of Fe+ Implanted Silicon

AuthID
 P-006-6G3
5
Author(s)
Nunes, B
·
Tipo de Documento
Article
Year published
2013
Publicado
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 284, Páginas: 533-539 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-84883865455
Wos: WOS:000324248600075
Source Identifiers
ISSN: 0169-4332
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