Charged Particle Transport Modelling in Silane-Hydrogen Radio-Frequency Capacitively Coupled Discharges

AuthID
 P-000-M16
3
Author(s)
Salabas, A
·
Gousset, G
·
Tipo de Documento
Article
Year published
2002
Publicado
in VACUUM, ISSN: 0042-207X
Volume: 69, Número: 1-3, Páginas: 213-219 (7)
Conference
12Th International School on Vacuum, Electron and Ion Technologies, Date: SEP 17-21, 2001, Location: VARNA, BULGARIA, Patrocinadores: Bulgarian Acad Sci, Inst Electr, Inst Ion Beam Phys & Mat Res, Res Ctr Rossendorf, Fdn Evrika
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Publication Identifiers
SCOPUS: 2-s2.0-0037168619
Wos: WOS:000180739000034
Source Identifiers
ISSN: 0042-207X
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