Optical Fiber Interferometer for Measuring the D(33) Coefficient of Piezoelectric Thin Films with Compensation of Substrate Bending

AuthID
P-000-PM3
Tipo de Documento
Article
Year published
2002
Publicado
in REVIEW OF SCIENTIFIC INSTRUMENTS, ISSN: 0034-6748
Volume: 73, Número: 5, Páginas: 2073-2078 (6)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0036575007
Wos: WOS:000175194200015
Source Identifiers
ISSN: 0034-6748
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