Effect of Rf Power on the Properties of Ito Thin Films Deposited by Plasma Enhanced Reactive Thermal Evaporation on Unheated Polymer Substrates

AuthID
 P-000-PWW
6
Author(s)
Tipo de Documento
Article
Year published
2002
Publicado
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 299, Número: PART 2, Páginas: 1208-1212 (5)
Conference
19Th International Conference on Amorphous and Microcrystalline Semiconductors (Icams 19), Date: AUG 27-31, 2001, Location: OLD NICE, FRANCE
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Scopus®
Crossref®18
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Publication Identifiers
SCOPUS: 2-s2.0-0036531408
Wos: WOS:000175757600095
Source Identifiers
ISSN: 0022-3093
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