Improved A-Si:h Tft Performance Using A-Six-Ni1-X/A-Sixc1-X Stack Dielectrics

AuthID
 P-007-75V
4
Author(s)
1
Editor(es)
Hatalis M.K.Kanicki J.Summers C.J.Funada F.
Tipo de Documento
Proceedings Paper
Year published
1996
Publicado
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 424, Páginas: 59-64
Conference
Proceedings of the 1996 Mrs Spring Meeting, Date: 8 April 1996 through 12 April 1996, Location: San Francisco, CA, USA, Patrocinadores: MRS
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0030399823
Source Identifiers
ISSN: 0272-9172
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