Application of Thin-Film Micromachining on Glass

AuthID
 P-007-8CJ
3
Author(s)
Boucinha, M
·
1
Editor(es)
Schropp R.Branz H.M.Hack M.Shimizu I.Wagner S.
Tipo de Documento
Proceedings Paper
Year published
1999
Publicado
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 507, Páginas: 85-90
Conference
Proceedings of the 1998 Mrs Spring Meeting, Date: 14 April 1998 through 17 April 1998, Location: San Francisco, CA, USA, Patrocinadores: MRS
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0032655378
Source Identifiers
ISSN: 0272-9172
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