Doping of Amorphous and Microcrystalline Silicon Films by Hot-Wire Cvd and Rfpecvd at Low Substrate Temperatures on Plastic Substrates

AuthID
 P-007-995
3
Author(s)
5
Editor(es)
Collins,RW;Branz,HM;Stutzmann,M;Guha,S;Okamoto,H
Tipo de Documento
Proceedings Paper
Year published
2000
Publicado
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 609, Páginas: A2261-A2266
Conference
Amorphous and Heterogeneus Silicon Thin Films-2000, Date: 24 April 2000 through 28 April 2000, Location: San Francisco, CA
Indexing
Scopus®
Crossref®8
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-0034428426
Source Identifiers
ISSN: 0272-9172
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