Krf Excimer Laser Dry and Steam Cleaning of Silicon Surfaces with Metallic Particulate Contaminants

AuthID
 P-000-QBJ
4
Author(s)
Arronte, M
·
Tipo de Documento
Article
Year published
2002
Publicado
in APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, ISSN: 0947-8396
Volume: 74, Número: 2, Páginas: 191-199 (9)
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-0036477495
Wos: WOS:000174223800011
Source Identifiers
ISSN: 0947-8396
Export Publication Metadata
Lista Marked
 Adicionar à lista Marked
Info
At this moment we don't have any links to full text documens.

Um espaço para investigadores e suas Instituições

Links Úteis

Ajuda

© 2024 CRACS & Inesc TEC - All Rights Reserved Política de Privacidade | Terms of Service