Coaxial Microwave Excitation Device to Ionize Vapor Sputtered by the Magnetron [Dispositif Coaxial D'excitation Micro-Ondes Pour L'ionisation de Vapeur Pulvérisée Par Magnétron]

AuthID
 P-007-CAB
12
Author(s)
Boisse Laporte, C
·
Leroy, O
·
De Poucques, L
·
Teule Gay, L
·
Hagelaar, JHA
·
Kouassi, N
·
Pagnon, D
·
Gousset, G
·
Leprince, P
·
Bretagne, J
·
Touzeau, M
Tipo de Documento
Article
Year published
2002
Publicado
in Vide: Science, Technique et Applications, ISSN: 1266-0167
Volume: 2 4, Número: 304, Páginas: 272-283+237+430
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-1242313297
Source Identifiers
ISSN: 1266-0167
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