Influence of Heat Treatment on the Structure of W-Si-N Sputtered Films

AuthID
 P-000-QSD
4
Author(s)
Ferreira, L
·
1
Editor(es)
Vieira,T
Tipo de Documento
Article
Year published
2002
Publicado
in ADVANCED MATERIALS FORUM I in KEY ENGINEERING MATERIALS, ISSN: 1013-9826
Volume: 230-2, Páginas: 640-643 (4)
Conference
1St International Materials Symposium (Materials 2001), Date: APR 09-11, 2001, Location: COIMBRA, PORTUGAL, Patrocinadores: Portuguese Soc Mat, Host: UNIV COIMBRA
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Publication Identifiers
SCOPUS: 2-s2.0-0036435254
Wos: WOS:000179553200147
Source Identifiers
ISSN: 1013-9826
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