Thin Film Microelectromechanical Systems

AuthID
P-000-QTT
3
Author(s)
4
Editor(es)
Cohen, JD; Abelson, JR; Matsumura, H; Robertson, J
Tipo de Documento
Proceedings Paper
Year published
2002
Publicado
in AMORPHOUS AND HETEROGENEOUS SILICON-BASED FILMS-2002 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 715, Páginas: 745-755 (11)
Conference
Symposium on Amorphous and Heterogeneous Silicon-Based Films Held at the 2002 Mrs Spring Meeting, Date: APR 02-05, 2002, Location: SAN FRANCISCO, CA, Patrocinadores: Mat Res Soc
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0036920226
Wos: WOS:000179162400108
Source Identifiers
ISSN: 0272-9172
Export Publication Metadata
Info
At this moment we don't have any links to full text documens.