Ain Thin Films Formed by Time Modulated Low Temperature Reactive Magnetron Sputtering and Their Properties

AuthID
 P-007-F19
6
Author(s)
Afanasjev, AP
·
Gudovskikh, AS
·
Luchinin, VV
·
Sazanov, AP
·
Terukov, EI
·
Tipo de Documento
Article
Year published
2000
Publicado
in Journal of Wide Bandgap Materials, ISSN: 1524-511X
Volume: 8, Número: 2, Páginas: 105-114
Indexing
Scopus®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-3242717198
Source Identifiers
ISSN: 1524-511X
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