in Proceedings of SPIE - The International Society for Optical Engineering, ISSN: 0277-786X
Volume: 5401, Páginas: 597-604
Conference
Micro- and Nanoelectronics 2003, Date: 6 October 2003 through 10 October 2003, Location: Zvenigorod, Patrocinadores: Ministry of Industry, Sciences, and Technologies of Russia;NIX Company, Russia;Carl Zeiss, Germany;NT-MDT Company, Russia