Coaxial Microwave Excitation Device for Magnetron Sputtered Vapor Ionization

AuthID
 P-000-S2X
12
Author(s)
Boisse Laporte, C
·
Leroy, O
·
Teule Gay, L
·
Hagelaar, JHA
·
Kouassi, N
·
Pagnon, D
·
Gousset, G
·
Leprince, P
·
Bretagne, J
·
Touzeau, M
Tipo de Documento
Article
Year published
2002
Publicado
in VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, ISSN: 1266-0167
Volume: 57, Número: 304, Páginas: 272-+ (13)
Indexing
Wos®
Publication Identifiers
Wos: WOS:000176570200004
Source Identifiers
ISSN: 1266-0167
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