Sensitivity Linearization Technique for a Time Based Mems Accelerometer

AuthID
 P-007-ZXG
4
Author(s)
Tipo de Documento
Proceedings Paper
Year published
2011
Publicado
in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Páginas: 715-718
Conference
2011 16Th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11, Date: 5 June 2011 through 9 June 2011, Location: Beijing
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Publication Identifiers
SCOPUS: 2-s2.0-80052121137
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