Reliability and Stability of Thin-Film Amorphous Silicon Mems on Glass Substrates

AuthID
 P-008-0EW
3
Author(s)
Tipo de Documento
Proceedings Paper
Year published
2011
Publicado
in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 1299, Páginas: 85-90
Conference
2010 Mrs Fall Meeting, Date: 29 November 2010 through 3 December 2010, Location: Boston, MA
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Publication Identifiers
SCOPUS: 2-s2.0-80053176686
Source Identifiers
ISSN: 0272-9172
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