Integration of Piezoelectric (Pb, La)Tio3 on (100)Inp by Using a Ceo2 Buffer Layer

AuthID
 P-000-VQ6
6
Author(s)
Vasco, E
·
Vazquez, L
·
Zaldo, C
·
Coya, C
·
Tipo de Documento
Article
Year published
2001
Publicado
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN: 1071-1023
Volume: 19, Número: 3, Páginas: 812-817 (6)
Conference
13Th International Vaccum Microelectronics Conference, Date: 14 August 2000 through 17 August 2000, Location: Guangzhou
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-0035326378
Wos: WOS:000169366600035
Source Identifiers
ISSN: 1071-1023
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