Mechanical Spectrum Analyzer in Silicon Using Micromachined Accelerometers with Time-Varying Electrostatic Feedback

AuthID
P-008-PE2
4
Author(s)
Tipo de Documento
Proceedings Paper
Year published
2003
Publicado
in Conference Record - IEEE Instrumentation and Measurement Technology Conference
Volume: 2, Páginas: 1197-1201
Conference
Proceedings of the 20Th Ieee Information and Measurement Technology Conference, Date: 20 May 2003 through 22 May 2003, Location: Vail, CO, Patrocinadores: IEEE Instrumentation and Measurment Society
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0038159359
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