Fabrication and Characterization of Pzt Thin Films for Micromotors

AuthID
 P-008-RTX
7
Author(s)
Muralt, P
·
Kohli, M
·
Maeder, T
·
Luthier, R
·
Setter, N
Document Type
Proceedings Paper
Year published
1995
Published
in International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
Volume: 1, Pages: 397-400
Conference
Proceedings of the 1995 8Th International Conference on Solid-State Sensors and Actuators and Eurosensors Ix. Part 1 (Of 2), Date: 25 June 1995 through 29 June 1995, Location: Stockholm, Sweden
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0029519837
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