Nanocrystalline Diamond Coating of Silicon Nitride Ceramics by Microwave Plasma-Assisted Cvd

AuthID
 P-000-2TG
6
Author(s)
Benedic, F
·
Gicquel, A
Tipo de Documento
Article
Year published
2005
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 482, Número: 1-2, Páginas: 232-236 (5)
Conference
Symposium on Synthesis, Characterisation and Advanced Application of Amorphous Carbon Films, Date: MAY 24-28, 2004, Location: Strasbourg, FRANCE, Patrocinadores: French Res Network, French Minist Res, French Minist Defense
Indexing
Wos®
Scopus®
Crossref®13
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-17644394915
Wos: WOS:000229681500041
Source Identifiers
ISSN: 0040-6090
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