Correlation Between A-Si : H Surface Oxidation Process and the Performance of Mis Structures

AuthID
 P-000-WD1
6
Author(s)
Tipo de Documento
Article
Year published
2001
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 383, Número: 1-2, Páginas: 185-188 (4)
Conference
3Rd Symposium O on Thin Film Materials for Large Area Electronics of the E-Mrs 2000 Spring Meeting, Date: MAY 30-JUN 02, 2000, Location: STRASBOURG, FRANCE, Patrocinadores: French Minist Res, Balzers AG, Unaxis, Jobin Yvon
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Publication Identifiers
SCOPUS: 2-s2.0-0035246805
Wos: WOS:000167378300045
Source Identifiers
ISSN: 0040-6090
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