Influence of the Process Parameters on Structural and Electrical Properties of R.f. Magnetron Sputtering Ito Films

AuthID
 P-000-WD3
5
Author(s)
Baia, I
·
Fernandes, B
·
Nunes, P
·
Quintela, M
·
Document Type
Article
Year published
2001
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 383, Issue: 1-2, Pages: 244-247 (4)
Conference
3Rd Symposium O on Thin Film Materials for Large Area Electronics of the E-Mrs 2000 Spring Meeting, Date: MAY 30-JUN 02, 2000, Location: STRASBOURG, FRANCE, Sponsors: French Minist Res, Balzers AG, Unaxis, Jobin Yvon
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Publication Identifiers
Scopus: 2-s2.0-2942746184
Wos: WOS:000167378300061
Source Identifiers
ISSN: 0040-6090
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