Role of Rf Power and Gas Mixture in Some Optical and Photoluminescence Properties of Dual-Plasma A-C : H Films

AuthID
 P-008-XMP
7
Author(s)
Heitz, T
·
Godet, C
·
Bouree, JE
·
Drevillon, B
·
Clerc, C
4
Editor(es)
Parsons, GN; Tsai, CC; Fahlen, TS; Seager, CH
Tipo de Documento
Proceedings Paper
Year published
1998
Publicado
in FLAT-PANEL DISPLAY MATERIALS-1998 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 508, Páginas: 203-208 (6)
Conference
Materials-Research-Society Symposium on Flat-Panel Display Materials, Date: APR 13-17, 1998, Location: SAN FRANCISCO, CA, Patrocinadores: Mat Res Soc
Indexing
Wos®
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0032314062
Wos: WOS:000077248500032
Source Identifiers
ISSN: 0272-9172
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