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Growth of Microcrystalline Beta-Sic Films on Silicon by Ecr Plasma Cvd

AuthID
P-009-2TV

Author(s)

Toal, SJ

Reehal, HS

Barradas, NP

Jeynes, C

Tipo de Documento

Article

Year published

1999

Publicado

in APPLIED SURFACE SCIENCE, ISSN: 0169-4332

Volume: 138, Número: 1-4, Páginas: 424-428 (5)

Conference

Symposium on Surface Processing - Laser, Lamp, Plasma, at the Annual Spring Meeting of the European-Materials-Society (E-Mrs 96), Date: JUN 16-19, 1996-1998, Location: STRASBOURG, FRANCE, Patrocinadores: European Mat Soc

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Publication Identifiers

DOI: 10.1016/s0169-4332(98)00435-8

SCOPUS: 2-s2.0-0347182000

Wos: WOS:000078576400081

Source Identifiers

ISSN: 0169-4332

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Growth of Microcrystalline Beta-Sic Films on Silicon by Ecr Plasma Cvd

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