Processing and Characterisation of Sol-Gel Deposited Ta2O5 and Tio2-Ta2O5 Dielectric Thin Films

AuthID
 P-009-2TX
4
Author(s)
Cappellani, A
·
Keddie, JL
·
Jackson, SM
Tipo de Documento
Article
Year published
1999
Publicado
in SOLID-STATE ELECTRONICS, ISSN: 0038-1101
Volume: 43, Número: 6, Páginas: 1095-1099 (5)
Conference
Symposium on Materials and Processes for Submicron Technologies, at the E-Mrs Spring Meeting, Date: JUN 16-19, 1998, Location: STRASBOURG, FRANCE, Patrocinadores: European Mat Res Soc
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Publication Identifiers
SCOPUS: 2-s2.0-0032684609
Wos: WOS:000081181700018
Source Identifiers
ISSN: 0038-1101
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