Publicações

Structural Analysis of Nanocrystalline Sic Thin Films Grown on Silicon by Ecr Plasma Cvd

AuthID
P-009-2V2

Author(s)

Toal, SJ

Tipo de Documento

Article

Year published

1999

Publicado

in THIN SOLID FILMS, ISSN: 0040-6090

Volume: 343, Número: 1-2, Páginas: 292-294 (3)

Conference

14Th International Vacuum Congress/10Th International Conference on Solid Surfaces/5Th International Conference on Nanometre-Scale Science and Technology/10Th International Conference on Quantitative Surface Analysis, Date: AUG 31-SEP 04, 1998, Location: BIRMINGHAM, ENGLAND, Patrocinadores: British Vacuum Council, Inst Phys, Int Union Vacuum Sci Tech & Applicat

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