Gas Viscosity Mems Sensor Based on Pull-In

AuthID
P-009-3AR
4
Author(s)
Tipo de Documento
Proceedings Paper
Year published
2013
Publicado
in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Páginas: 980-983
Conference
2013 17Th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013, Date: 16 June 2013 through 20 June 2013, Location: Barcelona
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Publication Identifiers
SCOPUS: 2-s2.0-84891724259
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