The Influence of Substrate Temperature and Al Mobility on the Microstructural Evolution of Magnetron Sputtered Ternary Ti-Al-N Thin Films

AuthID
 P-009-EZC
7
Author(s)
Beckers, M
·
Hoglund, C
·
Baehtz, C
·
Persson, POA
·
Hultman, L
·
Moeller, W
Tipo de Documento
Article
Year published
2009
Publicado
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 106, Número: 6, Páginas: 064915 (7)
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-70349823227
Wos: WOS:000270378100167
Source Identifiers
ISSN: 0021-8979
Export Publication Metadata
Lista Marked
 Adicionar à lista Marked
Info
At this moment we don't have any links to full text documens.

Um espaço para investigadores e suas Instituições

Links Úteis

Ajuda

© 2024 CRACS & Inesc TEC - All Rights Reserved Política de Privacidade | Terms of Service