Study of Zro2-Y2O3 Films Prepared by Rf Magnetron Reactive Sputtering

AuthID
P-000-YDM
5
Author(s)
Tipo de Documento
Article
Year published
2000
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 377, Páginas: 32-36 (5)
Conference
27Th International Conference on Metallurgical Coatings and Thin Films, Date: APR 10-14, 2000, Location: SAN DIEGO, CALIFORNIA, Patrocinadores: Amer Vacuum Soc, Adv Surface Engn Div
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0034515133
Wos: WOS:000166024600007
Source Identifiers
ISSN: 0040-6090
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