Influence of Low Energy Argon Plasma Treatment on the Moisture Barrier Performance of Hot Wire-Cvd Grown Sinx Multilayers

AuthID
P-009-MA7
7
Author(s)
Bonnassieux, Y
·
Bouree, JE
Tipo de Documento
Article
Year published
2014
Publicado
in JAPANESE JOURNAL OF APPLIED PHYSICS, ISSN: 0021-4922
Volume: 53, Número: 5, Páginas: 05FM05 (5)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-84903315834
Wos: WOS:000338316200107
Source Identifiers
ISSN: 0021-4922
Export Publication Metadata
Info
At this moment we don't have any links to full text documens.