Publicações

AuthID
P-00A-0J5

Author(s)

Kaur, A

Kumar, J

Bhatnagar, C

Dixit, SK

Bhatnagar, PK

Mathur, PC

Tipo de Documento

Article

Year published

2015

Publicado

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 31, Páginas: 166-174 (9)

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Publication Identifiers

DOI: 10.1016/j.mssp.2014.11.030

SCOPUS: 2-s2.0-84916898851

Wos: WOS:000350513500023

Source Identifiers

ISSN: 1369-8001

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