Evaluation of Residual Stresses in Chemical-Vapor-Deposited Diamond Films

AuthID
 P-001-0K2
3
Author(s)
Tipo de Documento
Article
Year published
2000
Publicado
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 87, Número: 6, Páginas: 2880-2884 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-0000339267
Wos: WOS:000085531400033
Source Identifiers
ISSN: 0021-8979
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