Characterization on Contacting Surfaces of Mems Electrostatic Switches by Sem, Edxa, and Xps

AuthID
 P-00A-9J6
4
Author(s)
Zeltser, IA
·
Document Type
Article
Year published
2015
Published
in ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, ISSN: 1687-8434
Volume: 2015, Pages: 1-6 (6)
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Publication Identifiers
Scopus: 2-s2.0-84925435433
Wos: WOS:000351382900001
Source Identifiers
ISSN: 1687-8434
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