Low Temperature Sub-Micron Gap Thin-Film Silicon Resonators on Glass Substrate

AuthID
 P-00A-9MH
5
Author(s)
Mouro, J
·
Gualdino, A
·
Teagno, L
·
2
Editor(es)
Sberveglieri, G; Ferrari, V
Tipo de Documento
Proceedings Paper
Year published
2014
Publicado
in 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) in Procedia Engineering, ISSN: 1877-7058
Volume: 87, Páginas: 1418-1421 (4)
Conference
28Th European Conference on Solid-State Transducers (Eurosensors), Date: SEP 07-10, 2014, Location: Brescia, ITALY, Patrocinadores: Natl Res Council, AISEM
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-84923381817
Wos: WOS:000369531700343
Source Identifiers
ISSN: 1877-7058
Export Publication Metadata
Lista Marked
 Adicionar à lista Marked
Info
At this moment we don't have any links to full text documens.

Um espaço para investigadores e suas Instituições

Links Úteis

Ajuda

© 2024 CRACS & Inesc TEC - All Rights Reserved Política de Privacidade | Terms of Service