Mechanical Behaviour of Amorphous W-Si-N Sputtered Films After Thermal Annealing at Increasing Temperatures

AuthID
 P-001-110
2
Author(s)
Tipo de Documento
Article
Year published
2000
Publicado
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 123, Número: 2-3, Páginas: 192-198 (7)
Conference
26Th International Conference on Metallurgical Coating and Thin Films, Date: APR 12-15, 1999, Location: SAN DIEGO, CALIFORNIA, Patrocinadores: Div Amer Vacuum Soc, Vacuum Metallurgy & Thin Films
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Scopus®
Crossref®21
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Publication Identifiers
SCOPUS: 2-s2.0-0034707820
Wos: WOS:000084717100015
Source Identifiers
ISSN: 0257-8972
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