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Role of the Gas Temperature and Power to Gas Flow Ratio on Powder Formation and Properties of Films Grown by the Pecvd Technique

AuthID
P-001-117

Author(s)

Martins, R

Silva, V

Ferreira, I

Domingues, A

Fortunato, E

Tipo de Documento

Article

Year published

2000

Publicado

in MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, ISSN: 0921-5107

Volume: 69, Páginas: 272-277 (6)

Conference

Spring Meeting of the European-Materials-Research-Society, Date: JUN 01-04, 1999, Location: STRASBOURG, FRANCE, Patrocinadores: European Mat Res Soc

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Publication Identifiers

DOI: 10.1016/s0921-5107(99)00307-4

SCOPUS: 2-s2.0-0033895960

Wos: WOS:000085591900050

Source Identifiers

ISSN: 0921-5107

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Role of the Gas Temperature and Power to Gas Flow Ratio on Powder Formation and Properties of Films Grown by the Pecvd Technique

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Role of the Gas Temperature and Power to Gas Flow Ratio on Powder Formation and Properties of Films Grown by the Pecvd Technique

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