Triangulation Based Sensor for Non-Contact Micro and Nano Topographic Surface' Inspection

AuthID
 P-001-156
1
Author(s)
2
Editor(es)
Lessard, RA; Lampropoulos, GA
Tipo de Documento
Proceedings Paper
Year published
2000
Publicado
in APPLICATIONS OF PHOTONIC TECHNOLOGY 4: CLOSING THE GAP BETWEEN THEORY, DEVELOPMENT, AND APPLICATION in PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE), ISSN: 0277-786X
Volume: 4087, Páginas: 1214-1221 (8)
Conference
4Th International Conference on Applications of Photonic Technology (Icapt 2000), Date: JUN 12-16, 2000, Location: QUEBEC CITY, CANADA
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Publication Identifiers
SCOPUS: 2-s2.0-84875457473
Wos: WOS:000168853700163
Source Identifiers
ISSN: 0277-786X
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