Silicon Films Produced by Pecvd Under Powder Formation Conditions

AuthID
P-001-219
6
Author(s)
4
Editor(es)
Martins, R; Ferreira, I; Fortunato, E; Kroesen, G
Tipo de Documento
Article
Year published
2000
Publicado
in PLASMA PROCESSING AND DUSTY PARTICLES in MATERIALS SCIENCE FORUM, ISSN: 0255-5476
Volume: 382, Páginas: 21-28 (8)
Conference
5Th European Workshop on Dusty and Collidal Plasmas, Date: JUN 03-05, 2000, Location: COSTA DA CAPARICA, PORTUGAL, Patrocinadores: New Univ Lisbon, Fac Sci Technol, UNINOVA, Minist Sci & Technol Portugal, Fdn Cience & Technol, Caloust Gulbenkian Fdn, Luso Amer Fdn Dev, N Atlantic Treat Org, NATO Sci Stabil
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Publication Identifiers
Wos: WOS:000174579900003
Source Identifiers
ISSN: 0255-5476
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