Ion Implantation of Microcrystalline Silicon for Low Process Temperature Top Gate Thin Film Transistors

AuthID
P-001-59C
7
Author(s)
Tipo de Documento
Article
Year published
1999
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 337, Número: 1-2, Páginas: 203-207 (5)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0346206462
Wos: WOS:000078353300047
Source Identifiers
ISSN: 0040-6090
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