Publicações

Structural and Optoelectronic Properties of Amorphous and Microcrystalline Silicon Deposited at Low Substrate Temperatures by Rf and Hwcvd

AuthID
P-001-5AS

Author(s)

Alpuim, P

Chu, V

Conde, JP

Editor(es)

Branz,HM;Collins,RW;Okamoto,H;Guha,S;Schropp,R

Tipo de Documento

Proceedings Paper

Year published

1999

Publicado

in AMORPHOUS AND HETEROGENEOUS SILICON THIN FILMS: FUNDAMENTALS TO DEVICES-1999 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172

Volume: 557, Páginas: 91-96 (6)

Conference

Symposium on Amorphous and Heterogeneous Silicon Thin Film - Fundamentals to Devices-1999 Held at the 1999 Mrs Spring Meeting, Date: APR 05-09, 1999, Location: SAN FRANCISCO, CA, Patrocinadores: Mat Res Soc, Akzo Nobel Chem & Coatings, Energy Convers Devices Inc, Fuji Elect Co, MVSyst Inc, Natl Renewable Energy Lab, Sanyo Elect Co, Solarex Corp, SONY Corp, United Solar Syst Corp, Voltaix Inc

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