Atomic Force Microscopy Study of Initial Nucleation in the Deposition of Mu C-Si : H

AuthID
P-001-5AT
3
Author(s)
5
Editor(es)
Branz, HM; Collins, RW; Okamoto, H; Guha, S; Schropp, R
Tipo de Documento
Proceedings Paper
Year published
1999
Publicado
in AMORPHOUS AND HETEROGENEOUS SILICON THIN FILMS: FUNDAMENTALS TO DEVICES-1999 in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 557, Páginas: 519-524 (6)
Conference
Symposium on Amorphous and Heterogeneous Silicon Thin Film - Fundamentals to Devices-1999 Held at the 1999 Mrs Spring Meeting, Date: APR 05-09, 1999, Location: SAN FRANCISCO, CA, Patrocinadores: Mat Res Soc, Akzo Nobel Chem & Coatings, Energy Convers Devices Inc, Fuji Elect Co, MVSyst Inc, Natl Renewable Energy Lab, Sanyo Elect Co, Solarex Corp, SONY Corp, United Solar Syst Corp, Voltaix Inc
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0033297550
Wos: WOS:000085825300078
Source Identifiers
ISSN: 0272-9172
Export Publication Metadata
Info
At this moment we don't have any links to full text documens.