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Excimer Laser Micromachining of Al2O3-Tic Ceramics
AuthID
P-001-600
3
Author(s)
Mendes, M
·
Oliveira, V
·
Vilar, R
Document Type
Proceedings Paper
Year published
1999
Published
in
MICROENGINEERING 99, PROCEEDINGS
Pages: 169-175 (7)
Conference
Congress for Microsystems and Precision Engineering (Microengineering 99),
Date:
SEP 29-OCT 01, 1999,
Location:
STUTTGART, GERMANY,
Sponsors:
Inst Mikrotech Mainz GmbH, Messe Stuttgart Int, ZVEI, IPA, LVI, VDI, GMM
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