Two-Dimensional Modelling of Sih4-H-2 Radio-Frequency Discharges for A-Si : H Deposition

AuthID
 P-001-7DW
5
Author(s)
Leroy, O
·
Gousset, G
·
Perrin, J
·
Tipo de Documento
Article
Year published
1998
Publicado
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 7, Número: 3, Páginas: 348-358 (11)
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Publication Identifiers
SCOPUS: 2-s2.0-0032142090
Wos: WOS:000075608000012
Source Identifiers
ISSN: 0963-0252
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