Publicações

Investigation of the Amorphous to Microcrystalline Phase Transition of Thin Film Silicon Produced by Pecvd

AuthID
P-001-88H

Author(s)

Martins, R

Macarico, A

Ferreira, I

Nunes, R

Bicho, A

Fortunato, E

Tipo de Documento

Article

Year published

1998

Publicado

in THIN SOLID FILMS, ISSN: 0040-6090

Volume: 317, Número: 1-2, Páginas: 144-148 (5)

Conference

5Th European Vacuum Conference (Evc 5) / 10Th International Conference on Thin Films (Ictf 10), Date: SEP 23-27, 1996, Location: SALAMANCA, SPAIN, Patrocinadores: Spanish Vacuum Soc, Int Union Vacuum Sci Technol & Applicat, Vacuum Sci & Thin Film Div, Host: UNIV SALAMANCA

Indexing