Determination of the Strain Depth Profile in Solid-Phase Epitaxially Grown Sige Layers Using Rbs/Channeling

AuthID
P-001-8DZ
6
Author(s)
Rodriguez, A
·
Rodriguez, T
·
da Silva, MF
·
Ballesteros, C
Tipo de Documento
Article
Year published
1998
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 136, Páginas: 395-399 (5)
Conference
13Th International Conference on Ion Beam Analysis (Iba-13), Date: JUL 27-AUG 01, 1997, Location: LISBON, PORTUGAL
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0032017494
Wos: WOS:000074380400069
Source Identifiers
ISSN: 0168-583X
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