Comparison of Computer Generated and Erda Depth Profiles of Oxygen Implanted into Silicon with Plasma Immersion Ion Implantation

AuthID
 P-001-BQT
3
Author(s)
Mandl, S
Document Type
Article
Year published
1997
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 124, Issue: 1, Pages: 63-68 (6)
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Publication Identifiers
Scopus: 2-s2.0-0031123839
Wos: WOS:A1997WU92600009
Source Identifiers
ISSN: 0168-583X
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