Deposition of Nanocrystalline Diamond Films on Silicon Nitride Ceramic Substrates Using Pulsed Microwave Discharges in Ar/H-2/Ch4 Gas Mixture

AuthID
 P-000-4DH
9
Author(s)
Bruno, P
·
Benedic, F
·
Tallaire, A
·
Silva, F
·
Tipo de Documento
Article
Year published
2005
Publicado
in DIAMOND AND RELATED MATERIALS, ISSN: 0925-9635
Volume: 14, Número: 3-7, Páginas: 432-436 (5)
Conference
15Th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides, and Silicon Carbide, Date: SEP 12-17, 2004, Location: Riva del Garda, ITALY, Patrocinadores: Aixtron AG, Diamond Business-Magazine, Elsevier Ltd, Iplas Innovat Plasma Syst GmbH, Roth & Rau AG, Seki Technotron Corp
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Publication Identifiers
SCOPUS: 2-s2.0-18444377068
Wos: WOS:000229751400036
Source Identifiers
ISSN: 0925-9635
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