Rutherford Backscattering Study of Thin Oxide Layers Prepared by Reactive Magnetron Sputtering

AuthID
 P-001-DSW
5
Author(s)
daSilva, MF
·
Tipo de Documento
Article
Year published
1996
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 118, Número: 1-4, Páginas: 626-629 (4)
Conference
12Th International Conference on Ion Beam Analysis (Iba-12), Date: MAY 22-26, 1995, Location: TEMPE, AZ, Host: ARIZONA STATE UNIV CAMPUS
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Publication Identifiers
SCOPUS: 2-s2.0-0030565053
Wos: WOS:A1996VN26100120
Source Identifiers
ISSN: 0168-583X
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